Yesterday, leading semiconductor product supplier, Mattson Technology, Inc., announced that a prominent Asia-based semiconductor foundry has placed multiple orders for the company’s Suprema® photoresist strip system. Mattson noted that the Suprema systems will be used for all dry strip applications including one of the most difficult processes, high dose implant strip (HDIS). The tool shipments, starting in the current quarter, will continue into the first half of 2010.
Mattson Technology designs, manufactures and markets semiconductor wafer processing equipment for use in the fabrication of integrated circuits. The company supplies plasma and rapid thermal processing equipment to the global semiconductor industry. Through manufacturing and design innovation, the company produces technologically advanced systems that provide cost effective solutions for customers fabricating current- and next-generation semiconductor devices.
Randy Matsuda, Sr. Vice President and General Manager of Mattson Technology’s Plasma Products Group, noted, “Suprema continues to gain acceptance as the most production-worthy dry strip system from our customers around the globe. This selection by our long-standing customer is a further testament to Suprema’s advantages in high reliability and productivity, coupled with enabling process performance and flexibility.”
Matsuda added, “The HDIS process qualified for production at the customer site is one of the most challenging in the industry. For the formation of shallow junctions in advanced devices, it is critical that we minimize the silicon loss following a clean removal of heavily implanted photoresist. We are very pleased that the Suprema is able to deliver exceptional performance in meeting the customer’s most critical HDIS challenges. We look forward to supporting the customer as they continue to make technology advancements.”